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J-GLOBAL ID:200902176592237680   Reference number:01A0083828

Improvement of contact resistances on plasma-exposed silicon carbide.

プラズマ露出シリコンカーバイド上接触抵抗の改善
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Volume: 44  Issue: 11  Page: 2081-2083  Publication year: Nov. 2000 
JST Material Number: H0225A  ISSN: 0038-1101  Document type: Article
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Materials of solid-state devices 
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