Art
J-GLOBAL ID:200902176651381609   Reference number:00A0917244

Structural modification of polymeric amorphous hydrogenated carbon films induced by high energetic He+ irradiation and thermal annealing.

高エネルギーHe+照射と熱アニーリングによるポリマ状アモルファス水素化炭素膜の構造改質
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Material:
Volume:Issue: 9/10  Page: 1758-1761  Publication year: Sep. 2000 
JST Material Number: W0498A  ISSN: 0925-9635  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thesaurus term/Semi thesaurus term
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JST classification
Category name(code) classified by JST.
Carbon and its compounds  ,  Irradiational changes of other materials 

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