Art
J-GLOBAL ID：200902176720932965   Reference number：98A0000397

Coaxial type vacuum arc evapolation source. Arc discharge film formation without fine particle contamination.

同軸型真空アーク蒸着源 微粒子混入のないアーク放電成膜
Author (1)：
CHATANIHARA AKIYOSHI

About CHATANIHARA AKIYOSHI

(大阪工技研)

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Material：
大工研ニュース

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Volume： 41  Issue： 10  Page： 1-2  Publication year： Oct. 1997 
JST Material Number： G0028A  ISSN： 1340-2714  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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vacuum arc

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,...
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JST classification (1)：
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Techniques and equipment of thin film deposition 
(BK14020I)

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Terms in the title (6)：
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Keywords automatically extracted from the title.
同軸

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, 
真空アーク蒸着

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, 
微粒子

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, 
混入

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, 
アーク放電

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, 
成膜

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