Art
J-GLOBAL ID:200902176993109846
Reference number:98A0560787
Investigation of anodized Si films by transmission electron microscope.
陽極酸化シリコン膜の断面TEM評価
Author (4):
,
,
,
Material:
Volume:
54th
Page:
96
Publication year:
1998
JST Material Number:
L1171A
Document type:
Proceedings
Country of issue:
Japan (JPN)
Language:
JAPANESE (JA)
Terms in the title (4):
Terms in the title
Keywords automatically extracted from the title.
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,
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