Sacrificial Wafer Bonding for Planarization After Very Deep Etching.

SPIERING V L; BERENSCHOT J W; ELWENSPOEK M; FLUITMAN J H J

Art

J-GLOBAL ID：200902177054873904 Reference number：95A0919221

Sacrificial Wafer Bonding for Planarization After Very Deep Etching.

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Author (4)： , , ,
Material：
Volume： 4 Issue： 3 Page： 151-157 Publication year： Sep. 1995
JST Material Number： W0357A ISSN： 1057-7157 CODEN： JMIYET Document type： Article
Country of issue： United States (USA) Language： ENGLISH (EN)

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