Ion current distribution in a filtered vacuum arc deposition system.

ZHITOMIRSKY V N; KAPLAN L; BOXMAN R L; GOLDSMITH S

Art

J-GLOBAL ID：200902177778271914 Reference number：96A0108287

Ion current distribution in a filtered vacuum arc deposition system.

フィルタをかけた真空アーク蒸着システムでのイオン電流分布

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Material：
Volume： 76/77 Issue： 1/3 Pt 1 Page： 190-196 Publication year： Nov. 1995
JST Material Number： D0205C ISSN： 0257-8972 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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