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J-GLOBAL ID：200902177842751755   Reference number：99A0260798

Estimation of Surface Profile from Defocused Fringe Observation using Phase Shift Interferometry.

位相シフト干渉法を用い焦点をずらせた干渉縞からの表面輪郭推定
Author (2)：
SAKUMA H

About SAKUMA H

(Tokyo Metropolitan Univ., Tokyo)

About Tokyo Metropolitan Univ., Tokyo

, 
HARADA T

About HARADA T

(Tokyo Metropolitan Univ., Tokyo)

About Tokyo Metropolitan Univ., Tokyo


Material：
International Journal of the Japan Society for Precision Engineering  (Int J Jpn Soc Precis Eng)

About International Journal of the Japan Society for Precision Engineering


Volume： 32  Issue： 4  Page： 284-285  Publication year： Dec. 1998 
JST Material Number： Z0715A  ISSN： 0916-782X  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)
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He-Ne laser

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JST classification (1)：
JST classification
Category name(code) classified by JST.
Measuring methods and instruments of length,area,cross section,volume,angle 
(AD05020O)

About Measuring methods and instruments of length,area,cross section,volume,angle

Reference (1)：
  • ROBINSON, D. Interferogram Analysis. 1993
Terms in the title (5)：
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位相シフト干渉法

About 位相シフト干渉法

, 
焦点

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, 
干渉縞

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, 
輪郭

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, 
推定

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