A comparative study of elastic recoil detection analysis(ERDA), electron energy loss spectroscopy(EELS) and X-ray photoelectron spectroscopy(XPS) for structural analysis of amorphous carbon nitride films.

SPAETH C; KUEHN M; RICHTER F; FALKE U; HIETSCHOLD M; KILPER R; KREISSIG U

Art

J-GLOBAL ID：200902178751448029 Reference number：99A0141733

A comparative study of elastic recoil detection analysis(ERDA), electron energy loss spectroscopy(EELS) and X-ray photoelectron spectroscopy(XPS) for structural analysis of amorphous carbon nitride films.

非晶質窒化炭素膜の構造解析のための弾性反跳検出分析(ERDA),電子エネルギー損失分光法(EELS)およびX線光電子分光法(XPS)の比較研究

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Material：
Volume： 7 Issue： 11/12 Page： 1727-1733 Publication year： Dec. 1998
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Electron spectroscopy , Properties of ceramics and ceramic whiteware

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