Art
J-GLOBAL ID：200902179163974381   Reference number：99A0769433

Progress and Trend of Smart Cut(R) SOI Technology.

Smart Cut(R) SOI技術の進捗と動向
Author (1)：
MITANI KIYOSHI

About MITANI KIYOSHI

(信越半導体 磯部研)

About 信越半導体 磯部研


Material：
超LSIウルトラクリーンテクノロジーシンポジウム  (Proceedings. Symposium on Ultra Clean Technology)

About 超LSIウルトラクリーンテクノロジーシンポジウム


Volume： 33rd  Page： 119-126  Publication year： May. 27, 1999 
JST Material Number： L2116A  Document type： Proceedings
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*LSI

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,...
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Thesaurus term/Semi thesaurus term
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水素注入

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Semiconductor integrated circuit 
(NC03162T)

About Semiconductor integrated circuit

,  Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
SMART

About SMART

, 
SOI技術

About SOI技術

, 
動向

About 動向


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