Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates.

CHEN H D; UDAYAKUMAR K R; CROSS L E; BERNSTEIN J J; NILES L C

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J-GLOBAL ID：200902179191176369 Reference number：95A0437174

Dielectric, ferroelectric, and piezoelectric properties of lead zirconate titanate thick films on silicon substrates.

シリコン基板上のジルコニウム酸チタン酸鉛の誘電性,強誘電性および圧電性

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Material：
Volume： 77 Issue： 7 Page： 3349-3353 Publication year： Apr. 01, 1995
JST Material Number： C0266A ISSN： 0021-8979 CODEN： JAPIAU Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Piezoelectricity,pyroelectricity,electret , Oxide thin films

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