An AFM Encoder Using An Interferometer.

TORII AKIHIRO; DOI OSAMU; UEDA AKITERU

Art

J-GLOBAL ID：200902179423729653 Reference number：03A0036712

An AFM Encoder Using An Interferometer.

干渉計を用いたAFMエンコーダ

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Material：
Volume： 122-C Issue： 12 Page： 2061-2066 Publication year： Dec. 01, 2002
JST Material Number： S0810A ISSN： 0385-4221 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Measuring methods and instruments of length,area,cross section,volume,angle , Interferometry and interferometers

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