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J-GLOBAL ID：200902180292891997   Reference number：00A0703958

薄膜における固層反応と表面解析に関する研究

Author (4)：
SHIGUFURIDO HOFUMAN

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(金材技研)

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, 
YOSHIHARA KAZUHIRO

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(金材技研)

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, 
MIN K

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(金材技研)

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, 
RAR A

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(金材技研)

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Material：
文部科学省金属材料技術研究所研究報告集  (科学技術庁金属材料技術研究所研究報告集)

About 文部科学省金属材料技術研究所研究報告集


Volume： 22  Page： 127-131  Publication year： Mar. 31, 2000 
JST Material Number： G0092B  ISSN： 0285-7030  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*Auger electron spectroscopy

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,...
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深さ解析

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JST classification (1)：
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Surface structure of semiconductors 
(BK15030A)

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Terms in the title (3)：
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薄膜

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, 
解析

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, 
研究

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