Art
J-GLOBAL ID:200902180558483024   Reference number:97A1028153

Potential of VHF-plasmas for low-cost production of a-Si:H solar cells.

a-Si:H太陽電池の低コスト生産のためのVHFプラズマの可能性
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Material:
Volume: 48  Issue: 1/4  Page: 343-350  Publication year: Nov. 1997 
JST Material Number: D0513C  ISSN: 0927-0248  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Solar cell  ,  Semiconductor thin films  ,  Applications of plasma 
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