Optically driven micromachine elements.

FRIESE M E J; RUBINSZTEIN-DUNLOP H; GOLD J; HAGBERG P; HANSTORP D

Art

J-GLOBAL ID：200902180583872922 Reference number：01A0326788

Optically driven micromachine elements.

光学的に駆動されるマイクロマシン要素

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Author (5)： , , , ,
Material：
Volume： 78 Issue： 4 Page： 547-549 Publication year： Jan. 22, 2001
JST Material Number： H0613A ISSN： 0003-6951 CODEN： APPLAB Document type： Article
Article type：短報 Country of issue： United States (USA) Language： ENGLISH (EN)

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Optics in general , Manufacturing technology of solid-state devices

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