Art
J-GLOBAL ID：200902180603558987
Reference number：95A0751388
Mechanisms of Removal of Micron-Sized Particles by High-Frequency Ultrasonic Waves.
高周波超音波利用のミクロンサイズ粒子除去のメカニズム
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Author (2)：
,
Material：
Volume：
42
Issue：
4
Page：
619-629
Publication year：
Jul. 1995
JST Material Number：
H0369A
ISSN：
0885-3010
CODEN：
ITUCER
Document type：
Article
Article type：
原著論文
Country of issue：
United States (USA)
Language：
ENGLISH (EN)
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JST classification (1)：
JST classification
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Manufacturing technology of solid-state devices
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