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J-GLOBAL ID:200902180603558987   Reference number:95A0751388

Mechanisms of Removal of Micron-Sized Particles by High-Frequency Ultrasonic Waves.

高周波超音波利用のミクロンサイズ粒子除去のメカニズム
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Volume: 42  Issue:Page: 619-629  Publication year: Jul. 1995 
JST Material Number: H0369A  ISSN: 0885-3010  CODEN: ITUCER  Document type: Article
Article type: 原著論文  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices 
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