Art
J-GLOBAL ID：200902181055701713   Reference number：00A0057499

Specifications and Purification Methods for Ultrapure Water and Pure Water.

超純水・純水の規格と水の精製法
Author (1)：
NAKAMURA YUTAKA

About NAKAMURA YUTAKA

(野村マイクロ・サイエンス開発研究所)

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Material：
ぶんせき

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Issue： 12  Page： 1009-1016  Publication year： Dec. 05, 1999 
JST Material Number： S0128B  ISSN： 0386-2178  Document type： Article
Article type： 解説  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*ultrapure water

About ultrapure water

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
water analysis

About water analysis


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JST classification (1)：
JST classification
Category name(code) classified by JST.
Waterworks engineering and water treatment in general 
(SC02010X)

About Waterworks engineering and water treatment in general

Reference (15)：
  • 半導体製造装置協会. 半導体製造装置用語辞典(第4版). 1997
  • 用水・排水の試験に用いる水. JIS K 0557. 1998
  • SEMIスタンダード集(1998年日本語版). 1999, 1
  • 第13改正日本薬局方. 1996
  • 長島潜. 工業用水. 1996, 454, 50
ｍore...
Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
純水

About 純水

, 
規格

About 規格

, 
水

About 水

, 
精製

About 精製


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