The fine processing of the crustaceous material by the injection processing.

IZAWA MORIYASU; WATANABE MASATOMO; YASHIRO HIROYASU; HAGIWARA NAOYUKI; HORIKAWA HIROMICHI; OZAWA MASARU

Art

J-GLOBAL ID：200902181696782268 Reference number：99A0012702

The fine processing of the crustaceous material by the injection processing.

噴射加工による硬脆材料の微細加工

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Author (6)： , , , , ,
Material：
Volume： 1998 Page： 217-220 Publication year： 1998
JST Material Number： L0894A Document type： Proceedings
Article type：短報 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Special machining , Manufacturing technology of solid-state devices

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