Art
J-GLOBAL ID:200902181794558090   Reference number:01A0559357

Ga2O3 thin film for oxygen sensor at high temperature.

高温で用いる酸素センサ用のGa2O3薄膜
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Volume: 175/176  Page: 721-725  Publication year: May. 15, 2001 
JST Material Number: B0707B  ISSN: 0169-4332  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Other solid-state devices  ,  Oxide thin films 
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