Art
J-GLOBAL ID：200902181794558090   Reference number：01A0559357

Ga2O3 thin film for oxygen sensor at high temperature.

高温で用いる酸素センサ用のGa2O3薄膜
Author (4)：
OGITA M

About OGITA M

(Shizuoka Univ., Hamamatsu, JPN)

About Shizuoka Univ., Hamamatsu, JPN

, 
HIGO K

About HIGO K

(Shizuoka Univ., Hamamatsu, JPN)

About Shizuoka Univ., Hamamatsu, JPN

, 
NAKANISHI Y

About NAKANISHI Y

(Shizuoka Univ., Hamamatsu, JPN)

About Shizuoka Univ., Hamamatsu, JPN

, 
HATANAKA Y

About HATANAKA Y

(Shizuoka Univ., Hamamatsu, JPN)

About Shizuoka Univ., Hamamatsu, JPN


Material：
Applied Surface Science  (Appl Surf Sci)

About Applied Surface Science


Volume： 175/176  Page： 721-725  Publication year： May. 15, 2001 
JST Material Number： B0707B  ISSN： 0169-4332  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
*gallium oxide

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Other solid-state devices 
(NC03150A)

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,  Oxide thin films 
(BK14050P)

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Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
酸素センサ

About 酸素センサ

, 
Ga2O3

About Ga2O3

, 
薄膜

About 薄膜


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