Art

J-GLOBAL ID：200902181903554688   Reference number：95A0262278

Special Issue on Micromachines and Micro Electro Mechanical Systems. 3-Dimensional Specific Thickness Glass Diaphragm Lens for Dynamic Focusing.

可変焦点三次元特殊厚みガラスダイアフラムレンズ

Author (5)： KANEKO T (Nippondenso Co., Ltd., Aichi-ken, JPN) ,  YAMAGATA Y (Kanagawa Academy of Science and Technology, Kawasaki-shi, JPN) ,  IDOGAKI T (Nippondenso Co., Ltd., Aichi-ken, JPN) ,  HATTORI T (Nippondenso Co., Ltd., Aichi-ken, JPN) ,  HIGUCHI T (Kanagawa Academy of Science and Technology, Kawasaki-shi, JPN)
Material： IEICE Transactions on Electronics (Institute of Electronics, Information and Communication Engineers)  (IEICE Trans Electron (Inst Electron Inf Commun Eng))
Volume： E78-C  Issue： 2  Page： 123-127  Publication year： Feb. 1995 
JST Material Number： L1370A  ISSN： 0916-8524  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： three dimension ,...

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JST classification (2)： Optical devices in general  (BD06010L) ,  Manufacturing technology of solid-state devices  (NC03030V)

Reference (8)：

• SHIONO. Reflection micro-fresnel lenses and their use in an integrated focus sensor. Applied Optics. 1989, vol.28, no.15, 3434-3442
• HARADA, M. Variable-focus Concave Mirror utilizing Single Crystal Si Diaphragm. Proc. IEE Japan. 1989, no.715, 6.163-6.164
• HISANAGA, M. Fabrication of 3-dimensionally shaped Si diaphragm dynamic focusing mirror. Proc. IEEE Micro Electro Mechanical Systems. 1993, 30-35
• SAWADA, R. Fabrication of Advanced Integrated Optical Micro-encoder Chip. Proc. IEEE Micro Electro Mechanical Systems. 1994, 337-342
• BLOOMSTEIN, T. M. Laser Deposition and Etching of Three-Dimensional Microstructures. Tech. Digest IEEE Int. Conf. on Solid State Sensors and Actuators. 1991, 507-511

Terms in the title (2)： 可変焦点 ,  厚み