Art
J-GLOBAL ID：200902181924927182   Reference number：97A0400575

Reactive sputtering by SF6 cluster ion beams.

SF6クラスタイオンビームによる反応性スパッタリング
Author (4)：
TOYODA N

About TOYODA N

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
KITANI H

About KITANI H

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
MATSUO J

About MATSUO J

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN

, 
YAMADA I

About YAMADA I

(Kyoto Univ., Kyoto, JPN)

About Kyoto Univ., Kyoto, JPN


Material：
Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms  (Nuclear Instruments and Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms)

About Nuclear Instruments & Methods in Physics Research. Section B. Beam Interactions with Materials and Atoms


Volume： 121  Issue： 1/4  Page： 484-488  Publication year： Jan. 1997 
JST Material Number： H0899A  ISSN： 0168-583X  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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ion beam sputtering

About ion beam sputtering

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Sputtering 
(BK16110U)

About Sputtering

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
SF6

About SF6

, 
クラスタイオンビーム

About クラスタイオンビーム

, 
反応性スパッタリング

About 反応性スパッタリング


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