Art
J-GLOBAL ID：200902182448861980   Reference number：93A0765871

Deposition of carbon films by a filtered cathodic arc.

フィルタを通過したカソードアークによるカーボン膜の蒸着
Author (3)：
KUEHN M

About KUEHN M

(Technical Univ. Chemnitz, Chemnitz, DEU)

About Technical Univ. Chemnitz, Chemnitz, DEU

, 
MEJA P

About MEJA P

(Technical Univ. Chemnitz, Chemnitz, DEU)

About Technical Univ. Chemnitz, Chemnitz, DEU

, 
RICHTER F

About RICHTER F

(Technical Univ. Chemnitz, Chemnitz, DEU)

About Technical Univ. Chemnitz, Chemnitz, DEU


Material：
Diamond and Related Materials  (Diam Relat Mater)

About Diamond and Related Materials


Volume： 2  Issue： 10  Page： 1350-1354  Publication year： Aug. 16, 1993 
JST Material Number： W0498A  ISSN： 0925-9635  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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carbon material

About carbon material

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

,  Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (2)：
Terms in the title
Keywords automatically extracted from the title.
カーボン膜

About カーボン膜

, 
蒸着

About 蒸着


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