Art

J-GLOBAL ID：200902182668433610   Reference number：98A0200061

Sensors for Environmentally Concerned Gases. NO_x Sensor Using Multi-Layered Semiconducting Thin-Film.

多層型半導体薄膜を使うNO_xセンサ

Author (2)： HIWATARI T (Tokyo Denki Univ.) ,  HARA K (Tokyo Denki Univ.)
Material： 電気学会論文誌 E  (IEEJ Transactions on Sensors and Micromachines)
Volume： 118-E  Issue： 2  Page： 136-140  Publication year： Feb. 1998 
JST Material Number： L3098A  ISSN： 1341-8939  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *nitrogen oxide ,...

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JST classification (2)： Examination and measurement of harmful gas  (SB03050T) ,  Measurement,monitoring and instrumentation of chemical process  (XC02030Y)

Reference (11)：

• CHANG, S-C. Thin-film semiconductor NOx sensor. IEEE Trans.Electron Devices. 1979, ED-26, 1875-1880
• HUUSKO, J. Detection of NO and unburnt gases in combustion processes using SnO_2 sensors operated at different temperature. Sensors and Actuators B. 1992, 7, 700-703
• WILLIAMS, G. NOx response of tin dioxide based gas sensors. Sensors and Actuators B. 1993, 15-16, 349-353
• SADAOKA, Y. The NO_2 detecting ability of the phthalocyanine gas sensor. Denki Kagaku. 1980, 48, 486-490
• MIURA,. Solid-state amperometric NO_2 sensor using a sodium ion conductor. Sensors and Actuators B. 1996, 35-36, 124-129

Terms in the title (3)： 多層 ,  半導体薄膜 ,  NOxセンサ