Low Temperature Preparation of Sol-Gel PZT Thin Films for Pyroelectric and Other Integrated Devices.

GUNTER J C; STREIFFER S K; KINGON A I

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J-GLOBAL ID：200902183858037505 Reference number：97A0779351

Low Temperature Preparation of Sol-Gel PZT Thin Films for Pyroelectric and Other Integrated Devices.

ピロ電気デバイスおよび他の集積化デバイス用ゾル-ゲルPZT薄膜の低温作製

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Page： 223-226 Publication year： 1996
JST Material Number： K19970404 ISBN： 0-7803-3356-X Document type： Proceedings
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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