A water-resistant precursor in a wet process for TiO<sub>2</sub> thin film formation.

SATO M; HARA H; NISHIDE T; SAWADA Y

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J-GLOBAL ID：200902183860069422 Reference number：97A0073172

A water-resistant precursor in a wet process for TiO₂ thin film formation.

TiO₂薄膜形成用湿式過程における耐水前駆体

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Author (4)： , , ,
Material：
Volume： 6 Issue： 11 Page： 1767-1770 Publication year： Nov. 1996
JST Material Number： W0204A ISSN： 0959-9428 CODEN： JMACEP Document type： Article
Article type：原著論文 Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Oxide thin films

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A water-resistant precursor in a wet process for TiO2 thin film formation.

A water-resistant precursor in a wet process for TiO₂ thin film formation.