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J-GLOBAL ID:200902183867976581   Reference number:03A0060899

Development of an Infrared Temperature Sensor Using Semiconductor Thin Films (Part II). Evaluation of Trial Sensor Device.

赤外線による非接触温度センサの開発に関する研究 (第2報) センサ素子の試作と評価
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Issue: 12  Page: 37-41  Publication year: Dec. 2002 
JST Material Number: S0682B  ISSN: 0918-1687  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Thermoelectric devices  ,  Manufacturing technology of solid-state devices 

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