Art
J-GLOBAL ID：200902184812746052   Reference number：96A1019003

Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals.

バルクSi結晶からのナノメートル寸法の高周波機械共振器の作製
Author (2)：
CLELAND A N

About CLELAND A N

(California Inst. Technol., California)

About California Inst. Technol., California

, 
ROUKES M L

About ROUKES M L

(California Inst. Technol., California)

About California Inst. Technol., California


Material：
Applied Physics Letters  (Appl Phys Lett)

About Applied Physics Letters


Volume： 69  Issue： 18  Page： 2653-2655  Publication year： Oct. 28, 1996 
JST Material Number： H0613A  ISSN： 0003-6951  CODEN： APPLAB  Document type： Article
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
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silicon

About silicon

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Techniques for samples 
(BA02070O)

About Techniques for samples

,  Excitation,generation and measurements of vibrations 
(BB02030Z)

About Excitation,generation and measurements of vibrations

Terms in the title (5)：
Terms in the title
Keywords automatically extracted from the title.
バルク

About バルク

, 
Si結晶

About Si結晶

, 
高周波

About 高周波

, 
機械共振器

About 機械共振器

, 
作製

About 作製


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