Art

J-GLOBAL ID：200902185017410069   Reference number：98A0711142

Fabrication and Transformation Characteristics of Reversible Shape Memory Alloy Thin Film Actuators.

可逆式形状記憶合金の薄膜アクチェータの製作と変態特性

Author (4)： KURIBAYASHI K (Yamaguchi Univ., Yamaguchi) ,  SHIMIZU S (Yamaguchi Univ., Yamaguchi) ,  YOSHITAKE M (Technol. Res. Inst. Osaka Prefecture, Osaka) ,  OGAWA S (Technol. Res. Inst. Osaka Prefecture, Osaka)
Material： International Journal of the Japan Society for Precision Engineering  (Int J Jpn Soc Precis Eng)
Volume： 32  Issue： 2  Page： 110-115  Publication year： Jun. 1998 
JST Material Number： Z0715A  ISSN： 0916-782X  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： ENGLISH (EN)

Thesaurus term： *titanium containing alloy ,...

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JST classification (1)： Other metallography  (WB01040Y)

Reference (14)：

• KURIBAYASHI, K. A New Actuator of a Joint Mechanism Using TiNi Alloy Wire. The International Journal of Robotics Research. 1986, 4, 4, 47
• BUSCH, J. D. Prototype Micro-valve Actuator. Proc. IEEE Micro Electro Mechanical Systems. 1990, 40
• KURIBAYASHI, K. Reversible SMA Actuator for Micron Sized Robot. Proc. IEEE Micro Electro Mechanical Systems. 1990, 217
• WALKER, J. A. Thin-Film Processing of TiNi Shape Memory Alloy. Sensors and Actuators. 1990, A21, 1-3, 243
• IKUTA, K. Shape Memory Alloy Thin Film Fabricated by Laser Ablation. Proc. IEEE Micro Electro Mechanical Systems. 1994, 355

Terms in the title (4)： 形状記憶合金 ,  薄膜 ,  製作 ,  変態