Art
J-GLOBAL ID：200902185268627571   Reference number：99A0967025

High hardness of DLC coating film made by unbalanced magnetron sputtering.

アンバランスドマグネトロンスパッタリング成膜によるDLCコーティング膜の高硬度化
Author (4)：
MATSUOKA NAOKI

About MATSUOKA NAOKI

(神戸製鋼所 材研)

About 神戸製鋼所 材研

, 
IWAMURA EIJI

About IWAMURA EIJI

(神戸製鋼所 材研)

About 神戸製鋼所 材研

, 
MIYAMOTO TAKASHI

About MIYAMOTO TAKASHI

(神戸製鋼所 材研)

About 神戸製鋼所 材研

, 
AKARI KOICHIRO

About AKARI KOICHIRO

(神戸製鋼所)

About 神戸製鋼所


Material：
表面技術協会講演大会講演要旨集

About 表面技術協会講演大会講演要旨集


Volume： 100th  Page： 170-171  Publication year： Sep. 17, 1999 
JST Material Number： Y0050A  ISSN： 0917-2947  Document type： Proceedings
Article type： 短報  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*Diamond

About Diamond

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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All keywords is available on JDreamIII(charged).
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DLC(carbon)

About DLC(carbon)

,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Carbon and its compounds 
(YB02060D)

About Carbon and its compounds

,  Other surface treatment 
(WC08070F)

About Other surface treatment

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
成膜

About 成膜

, 
DLC

About DLC

, 
コーティング膜

About コーティング膜

, 
高硬度

About 高硬度


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