Growth Rate and Surface Morphology of Diamond Homoepitaxial Films on Misoriented (001) Substrates.

TSUNO T; SHIOMI H; KUMAZAWA Y; SHIKATA S; AKAI S

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J-GLOBAL ID：200902186034545063 Reference number：96A0902389

Growth Rate and Surface Morphology of Diamond Homoepitaxial Films on Misoriented (001) Substrates.

ミスオリエンテド(001)基板上のダイヤモンドホモエピタキシャル膜の成長速度と表面形態

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Material：
Volume： 35 Issue： 9A Page： 4724-4727 Publication year： Sep. 1996
JST Material Number： G0520B ISSN： 0021-4922 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Semiconductor thin films

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KAMO, M. J.Cryst.Growth. 1983, 62, 642
STONER, B. R. Phys.Rev. 1992, B45, 11067
JIANG, X. Appl.Phys.Lett. 1993, 62, 3438

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