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J-GLOBAL ID:200902186153708396   Reference number:94A0704885

Sublimation growth of 6H-SiC crystals on different faces of a 6H-SiC seed.

6H-SiC種結晶の様々な面上での6H-SiC結晶の昇華成長
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Issue: 137  Page: 17-20  Publication year: 1994 
JST Material Number: E0403B  ISSN: 0305-2346  CODEN: IPHSAC  Document type: Proceedings
Article type: 短報  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Semiconductor thin films 
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