Art
J-GLOBAL ID：200902186275953618   Reference number：99A0700827

KrF laser CVD of titanium oxide from titanium tetraisopropoxide.

チタンテトライソプロポキシドからの酸化チタンのKrFレーザCVD
Author (2)：
WATANABE A

About WATANABE A

(National Inst. Materials and Chemical Res., Ibaraki, JPN)

About National Inst. Materials and Chemical Res., Ibaraki, JPN

, 
IMAI Y

About IMAI Y

(National Inst. Materials and Chemical Res., Ibaraki, JPN)

About National Inst. Materials and Chemical Res., Ibaraki, JPN


Material：
Thin Solid Films

About Thin Solid Films


Volume： 348  Issue： 1/2  Page： 63-68  Publication year： Jul. 06, 1999 
JST Material Number： B0899A  ISSN： 0040-6090  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
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*thin film growth

About thin film growth

,...
Semi thesaurus term：
Thesaurus term/Semi thesaurus term
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alkoxide

About alkoxide

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Oxide thin films 
(BK14050P)

About Oxide thin films

Substance index (1)：
Substance index
Chemical Substance indexed to the Article.
Titanium(IV)tetraisopropoxide

About Titanium(IV)tetraisopropoxide

Terms in the title (4)：
Terms in the title
Keywords automatically extracted from the title.
チタンテトライソプロポキシド

About チタンテトライソプロポキシド

, 
酸化チタン

About 酸化チタン

, 
KrFレーザ

About KrFレーザ

, 
CVD

About CVD


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