Improved near surface heavy impurity detection by a novel charged particle energy filter technique.

ISHIBASHI K; PATNAIK B K; PARIKH N R; TATENO H; HUNN J D

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J-GLOBAL ID：200902186648392816 Reference number：96A0339976

Improved near surface heavy impurity detection by a novel charged particle energy filter technique.

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Author (5)： , , , ,
Material：
Page： 399-404 Publication year： 1995
JST Material Number： K19960154 ISBN： 1-55899-255-3 Document type： Proceedings
Country of issue： United States (USA) Language： ENGLISH (EN)

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