Measurement of Diffusion Coefficient of CF2 Radical in DC Pulsed CF4/H2 Discharge Plasma.

ARAI T; GOTO M; TAKAYAMA D; SHIMIZU T; MURAKAMI M; HORIKOSHI K; FUJIOKA H

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J-GLOBAL ID：200902187051537356 Reference number：95A0977261

Measurement of Diffusion Coefficient of CF₂ Radical in DC Pulsed CF₄/H₂ Discharge Plasma.

直流パルスCF₄/H₂放電プラズマにおけるCF₂ラジカルの拡散係数の測定

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Material：
Volume： 34 Issue： 10B Page： L1392-L1394 Publication year： Oct. 15, 1995
JST Material Number： F0599B ISSN： 0021-4922 Document type： Article
Article type：短報 Country of issue： Japan (JPN) Language： ENGLISH (EN)

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Discharges in general , Applications of plasma

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HANSEN, S. G. Appl.Phys.Lett. 1990, 56, 719

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