Double-layer anti-reflection coating using MgF<sub>2</sub> and CeO<sub>2</sub> films on a crystalline silicon substrate.

LEE S E; CHOI S W; YI J

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J-GLOBAL ID：200902187185182791 Reference number：01A0052791

Double-layer anti-reflection coating using MgF₂ and CeO₂ films on a crystalline silicon substrate.

結晶シリコン基板上のMgF₂及びCeO₂膜を用いた二重層反射防止コーティング

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Volume： 376 Issue： 1/2 Page： 208-213 Publication year： Nov. 01, 2000
JST Material Number： B0899A ISSN： 0040-6090 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Thin films of other inorganic compounds , Optical properties of condensed matter in general

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Double-layer anti-reflection coating using MgF2 and CeO2 films on a crystalline silicon substrate.

Double-layer anti-reflection coating using MgF₂ and CeO₂ films on a crystalline silicon substrate.