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J-GLOBAL ID:200902187191113173   Reference number:01A0142713

The properties of BCN films formed by ion beam assisted deposition.

イオンビーム介助析出により生成するBCN膜の性質
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Volume: 19  Issue:Page: 291-295  Publication year: Dec. 20, 2000 
JST Material Number: W0541A  ISSN: 0927-7765  Document type: Article
Article type: 原著論文  Country of issue: Netherlands (NLD)  Language: ENGLISH (EN)
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Thin films of other inorganic compounds 
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