Art
J-GLOBAL ID：200902187957192445   Reference number：94A0693633

Electrochemically Deposited Diffusion Barriers.

電気化学的に析出した拡散障壁
Author (4)：
PAUNOVIC M

About PAUNOVIC M

(IBM T.J. Watson Research Center, New York)

About IBM T.J. Watson Research Center, New York

, 
BAILEY P J

About BAILEY P J

(IBM T.J. Watson Research Center, New York)

About IBM T.J. Watson Research Center, New York

, 
SCHAD R G

About SCHAD R G

(IBM T.J. Watson Research Center, New York)

About IBM T.J. Watson Research Center, New York

, 
SMITH D A

About SMITH D A

(Stevens Inst. Technology, New Jersey)

About Stevens Inst. Technology, New Jersey


Material：
Journal of the Electrochemical Society  (J Electrochem Soc)

About Journal of the Electrochemical Society


Volume： 141  Issue： 7  Page： 1843-1850  Publication year： Jul. 1994 
JST Material Number： C0285A  ISSN： 1945-7111  CODEN： JESOAN  Document type： Article
Article type： 原著論文  Country of issue： United States (USA)  Language： ENGLISH (EN)
Thesaurus term：
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Keywords indexed to the article.
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structure of electric parts

About structure of electric parts

,...
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JST classification (3)：
JST classification
Category name(code) classified by JST.
Other electric and electronic parts 
(NA05090R)

About Other electric and electronic parts

,  Diffusion in metals 
(BL06022C)

About Diffusion in metals

,  Electrochemical reaction 
(CB07050F)

About Electrochemical reaction

Terms in the title (3)：
Terms in the title
Keywords automatically extracted from the title.
電気化学

About 電気化学

, 
析出

About 析出

, 
拡散障壁

About 拡散障壁


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