Art
J-GLOBAL ID：200902188560514248   Reference number：02A0639889

X-Ray Study on Deformation and Fracture of Solid. X-Ray Stress Measurement of Cu/TiN Films.

X線材料強度 Cu/TiN二層膜のX線残留応力測定
Author (3)：
MATSUE TATSUYA

About MATSUE TATSUYA

(新居浜工高専)

About 新居浜工高専

, 
HANABUSA TAKAO

About HANABUSA TAKAO

(徳島大 工)

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, 
IKEUCHI YASUKAZU

About IKEUCHI YASUKAZU

(新居浜工高専)

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Material：
材料  (Journal of the Society of Materials Science, Japan)

About 材料


Volume： 51  Issue： 7  Page： 743-748  Publication year： Jul. 15, 2002 
JST Material Number： F0385A  ISSN： 0514-5163  CODEN： ZARYA  Document type： Article
Article type： 原著論文  Country of issue： Japan (JPN)  Language： JAPANESE (JA)
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*multilayer film

About multilayer film

,...
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Thesaurus term/Semi thesaurus term
Keywords indexed to the article.
All keywords is available on JDreamIII(charged).
On J-GLOBAL, this item will be available after more than half a year after the record posted. In addtion, medical articles require to login to MyJ-GLOBAL.
titanium nitride

About titanium nitride


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Category name(code) classified by JST.
Vapor plating 
(WC08022K)

About Vapor plating

Reference (12)：
ｍore...
Terms in the title (7)：
Terms in the title
Keywords automatically extracted from the title.
X線

About X線

, 
材料強度

About 材料強度

, 
Cu

About Cu

, 
TiN

About TiN

, 
二層膜

About 二層膜

, 
残留

About 残留

, 
応力測定

About 応力測定


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