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J-GLOBAL ID:200902189641848570   Reference number:99A1016407

The Characteristics of Masking Photo Resist for Microblasting.

マイクロブラスト加工におけるマスキング材の特性 1
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Volume: 1999  Page: 109-110  Publication year: Sep. 09, 1999 
JST Material Number: L0894A  Document type: Proceedings
Article type: 短報  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Special machining  ,  Manufacturing technology of solid-state devices 
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