Art

J-GLOBAL ID：200902189759122116   Reference number：02A0271027

A Scanning Micromirror with Angular Comb Drive Actuation.

有角櫛形駆動をもつ走査微小鏡

Author (6)： PATTERSON P R (Univ. California at Los Angeles, California) ,  HAH D (Univ. California at Los Angeles, California) ,  NGUYEN H (Univ. California at Los Angeles, California) ,  TOSHIYOSHI H (Univ. Tokyo, Tokyo, JPN) ,  CHAO R-M (Univ. California at Los Angeles, California) ,  WU M C (Univ. California at Los Angeles, California)
Material： Technical Digest. IEEE Micro Electro Mechanical Systems  (IEEE International Conference on Micro Electro Mechanical Systems)
Volume： 15th  Page： 544-547  Publication year： 2002 
JST Material Number： W0377A  ISSN： 1084-6999  Document type： Proceedings
Article type： 短報  Country of issue： United States (USA)  Language： ENGLISH (EN)

Thesaurus term： *mirror ,...

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JST classification (1)： Optical instrument elements and their materials  (QF05020K)

Terms in the title (3)： 櫛形 ,  走査 ,  微小鏡