Art

J-GLOBAL ID：200902190531680915   Reference number：97A0904349

Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications.

Author (8)： MARXER C (Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE) ,  THIO C (Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE) ,  GRETILLAT M-A (Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE) ,  DE ROOIJ N F (Univ. Neuch<span style=text-decoration:overline>a^</span>tel, Neuch<span style=text-decoration:overline>a^</span>tel, CHE) ,  BAETTIG R (Ascom Tech AG, Bern, CHE) ,  ANTHAMATTEN O (Ascom Tech AG, Bern, CHE) ,  VALK B (Ascom Tech AG, Bern, CHE) ,  VOGEL P (Ascom Tech AG, Bern, CHE)
Material： Journal of Microelectromechanical Systems  (J Microelectromechanical Syst)
Volume： 6  Issue： 3  Page： 277-285  Publication year： Sep. 1997 
JST Material Number： W0357A  ISSN： 1057-7157  CODEN： JMIYET  Document type： Article
Country of issue： United States (USA)  Language： ENGLISH (EN)