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J-GLOBAL ID:200902190643682651   Reference number:96A0529993

Minitoring of Lapping Process with Piezoelectric Ceramic Sensor. (1st Report). Relation between Lapping Conditions and Detected Acoustic Signals.

圧電セラミックセンサによる研磨加工中の監視 (第1報) 加工条件と発生音響の関係
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Volume: 62  Issue:Page: 881-885  Publication year: Jun. 1996 
JST Material Number: F0268A  ISSN: 0912-0289  Document type: Article
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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