Nanostructured silicon for studying fundamental aspects of nanomechanics.

BLICK R H; ERBE A; PESCINI L; KRAUS A; SCHEIBLE D V; BEIL F W; HOERNER A; LORENZ H; KOTTHAUS J P

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J-GLOBAL ID：200902191947335512 Reference number：02A0747899

Nanostructured silicon for studying fundamental aspects of nanomechanics.

ナノ力学の基礎的側面を調べるためのナノ構造シリコン

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Volume： 14 Issue： 34 Page： R905-R945 Publication year： Sep. 02, 2002
JST Material Number： B0914B ISSN： 0953-8984 CODEN： JCOMEL Document type： Article
Article type：文献レビュー Country of issue： United Kingdom (GBR) Language： ENGLISH (EN)

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Manufacturing technology of solid-state devices

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