Art
J-GLOBAL ID：200902192612127911   Reference number：99A0587165

Physical, structural and mechanical characterization of Ti1-xSixNy films.

Ti1-xSixNy膜の物理的,構造的及び機械的評価
Author (5)：
VAZ F

About VAZ F

(Univ. Minho, Guimaraes, PRT)

About Univ. Minho, Guimaraes, PRT

, 
REBOUTA L

About REBOUTA L

(Univ. Minho, Guimaraes, PRT)

About Univ. Minho, Guimaraes, PRT

, 
RAMOS S

About RAMOS S

(Univ. Coimbra, Coimbra, PRT)

About Univ. Coimbra, Coimbra, PRT

, 
DA SILVA M F

About DA SILVA M F

(ITN, Sacav<span style=text-decoration:overline> ́e</span>m, PRT)

About ITN, Sacav<span style=text-decoration:overline> ́e</span>m, PRT

, 
SOARES J C

About SOARES J C

(CFNUL, Lisboa, PRT)

About CFNUL, Lisboa, PRT


Material：
Surface & Coatings Technology  (Surf Coat Technol)

About Surface & Coatings Technology


Volume： 108/109  Issue： 1/3  Page： 236-240  Publication year： Oct. 10, 1998 
JST Material Number： D0205C  ISSN： 0257-8972  Document type： Article
Article type： 原著論文  Country of issue： Netherlands (NLD)  Language： ENGLISH (EN)
Thesaurus term：
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*titanium compound

About titanium compound

,...
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JST classification (1)：
JST classification
Category name(code) classified by JST.
Thin films of other inorganic compounds 
(BK14060A)

About Thin films of other inorganic compounds

Terms in the title (2)：
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物理

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, 
評価

About 評価


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