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J-GLOBAL ID:200902193850987682   Reference number:98A0789501

Micromachined Inertial Sensors.

マイクロマシン加工慣性センサ
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Volume: 86  Issue:Page: 1640-1659  Publication year: Aug. 1998 
JST Material Number: D0378A  ISSN: 0018-9219  CODEN: IEEPAD  Document type: Article
Article type: 文献レビュー  Country of issue: United States (USA)  Language: ENGLISH (EN)
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Manufacturing technology of solid-state devices  ,  Measuring methods and instruments of time,speed,acceleration,angular veloc? 
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