Art
J-GLOBAL ID：200902193850987682   Reference number：98A0789501

Micromachined Inertial Sensors.

マイクロマシン加工慣性センサ
Author (3)：
YAZDI N

About YAZDI N

(Univ. Michigan, MI, USA)

About Univ. Michigan, MI, USA

, 
AYAZI F

About AYAZI F

(Univ. Michigan, MI, USA)

About Univ. Michigan, MI, USA

, 
NAJAFI K

About NAJAFI K

(Univ. Michigan, MI, USA)

About Univ. Michigan, MI, USA


Material：
Proceedings of the IEEE  (Proc IEEE)

About Proceedings of the IEEE


Volume： 86  Issue： 8  Page： 1640-1659  Publication year： Aug. 1998 
JST Material Number： D0378A  ISSN： 0018-9219  CODEN： IEEPAD  Document type： Article
Article type： 文献レビュー  Country of issue： United States (USA)  Language： ENGLISH (EN)
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All keywords is available on JDreamIII(charged).
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*micromachining

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,...
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Manufacturing technology of solid-state devices 
(NC03030V)

About Manufacturing technology of solid-state devices

,  Measuring methods and instruments of time,speed,acceleration,angular veloc? 
(AD05040K)

About Measuring methods and instruments of time,speed,acceleration,angular veloc?

Terms in the title (2)：
Terms in the title
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マイクロマシン加工

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, 
慣性センサ

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