Intelligent Material and Fluid Systems. Large Scale Active Microvibration Control System Using Piezoelectric Actuators Applied to Semiconductor Manufacturing Equipment.

KAJIWARA KOICHI; HAYATSU MASAKI; IMAOKA SHIZUO; FUJITA TAKAFUMI

Art

J-GLOBAL ID：200902193883393001 Reference number：98A0084724

Intelligent Material and Fluid Systems. Large Scale Active Microvibration Control System Using Piezoelectric Actuators Applied to Semiconductor Manufacturing Equipment.

インテリジェント材料・流体システムピエゾアクチュエータを用いた大形アクティブ微振動制御装置の半導体製造装置への適用

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Material：
Volume： 63 Issue： 615 Page： 3735-3742 Publication year： Nov. 1997
JST Material Number： F0045B ISSN： 0387-5024 Document type： Article
Article type：原著論文 Country of issue： Japan (JPN) Language： JAPANESE (JA)

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Propagation of vibrations , Piezoelectric devices

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