A new method of formation of impurity-doped diamond films by bias method.

SAITO D; TSUTSUMI E; ISHIGAKI N; TASHIRO T; KIMURA T; YUGO S

Art

J-GLOBAL ID：200902194764825145 Reference number：02A0786266

A new method of formation of impurity-doped diamond films by bias method.

バイアス法による不純物ドープダイヤモンド膜を新しい生成方法

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Author (6)： , , , , ,
Material：
Volume： 11 Issue： 10 Page： 1804-1807 Publication year： Oct. 2002
JST Material Number： W0498A ISSN： 0925-9635 Document type： Article
Article type：原著論文 Country of issue： Netherlands (NLD) Language： ENGLISH (EN)

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Thin films of other inorganic compounds

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