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J-GLOBAL ID：200902194824288411
Reference number：97A0476822
Mechanical Properties of (Ti1-xAlx)N0.3 Films Prepared by the Dynamic Ion Mixing Method.
動的イオン混合法によって作製した(Ti1-xAlx)N0.3膜の機械的性質
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Author (4)：
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Material：
Volume：
36
Issue：
4A
Page：
2308-2312
Publication year：
Apr. 1997
JST Material Number：
G0520B
ISSN：
0021-4922
Document type：
Article
Article type：
原著論文
Country of issue：
Japan (JPN)
Language：
ENGLISH (EN)
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JST classification (2)：
JST classification
Category name(code) classified by JST.
Metallic thin films
, Mechanical properties of metals
Reference (13)：
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MUNZ, W. -D. J.Vac.Sci.& Technol.A. 1986, 4, 2717
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LEE, S. -H. J.Vac.Sci.& Technol.A. 1994, 12, 1602
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HULTMAN, L. Thin Solid Films. 1991, 205, 153
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KONIG, U. Surf.Coat.Technol. 1987, 33, 91
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ROOS, J. R. Thin Solid Films. 1995, 193/194, 547
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Terms in the title (3)：
Terms in the title
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