Preparation and properties of highly tetrahedral hydrogenated amorphous carbon.

WEILER M; SATTEL S; GIESSEN T; JUNG K; EHRHARDT H; VEERASAMY V S; ROBERTSON J

Art

J-GLOBAL ID：200902196796694444 Reference number：96A0225339

Preparation and properties of highly tetrahedral hydrogenated amorphous carbon.

高度に4面体水素化した非晶質炭素の調製と特性

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Material：
Volume： 53 Issue： 3 Page： 1594-1608 Publication year： Jan. 15, 1996
JST Material Number： D0746A ISSN： 1098-0121 CODEN： PRBMDO Document type： Article
Article type：原著論文 Country of issue： United States (USA) Language： ENGLISH (EN)

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Semiconductor thin films

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