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J-GLOBAL ID:200902197551568270   Reference number:01A0701888

Polymers as sulfonic acid generator on irradiation at 146nm.

146nmでの照射時のスルホン酸発生剤としての高分子
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Volume: 37  Issue:Page: 1625-1634  Publication year: Aug. 2001 
JST Material Number: B0690A  ISSN: 0014-3057  CODEN: EUPJA  Document type: Article
Article type: 原著論文  Country of issue: United Kingdom (GBR)  Language: ENGLISH (EN)
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Aromatic monocyclic sulfonic acids,sulfinic acids,sulfenic acids  ,  Copolymerization  ,  Manufacturing technology of solid-state devices 
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