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J-GLOBAL ID:200902197793857845   Reference number:96A0367239

Analysis of Surface Generation and Removal Mechanism by Ultraprecision ELID-Grinding.

超精密ELID研削面の表面解析と除去機構の考察
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Material:
Volume: 1995  Page: 1-2  Publication year: 1995 
JST Material Number: L0894A  Document type: Proceedings
Article type: 原著論文  Country of issue: Japan (JPN)  Language: JAPANESE (JA)
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Manufacturing technology of solid-state devices  ,  Grinding and abrasion materials 
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